CVD system

Altatech, a subsidiary of Soitec, introduced a multi-chamber chemical vapor deposition (CVD) system that enables photovoltaic (PV) cell manufacturers to develop and optimize their solar cell designs using advanced thin-film deposition of amorphous silicon and other materials. By performing all deposition processes within a single system, the AltaCVD Solarlab tool reduces cycle times and materials consumption in fabricating advanced single-junction, tandem-junction and triple-junction PV cells. Using the AltaCVD Solarlab, customers can deposit transparent conducting oxide (TCO) films that deliver the superior optical characteristics, high doping mobility and smooth, defect-free surfaces needed to optimize efficiency of their solar cells. The AltaCVD Solarlab system has the versatility to perform standard thermal CVD processing as well as plasma-enhanced CVD and atomic-layer deposition. These processes can be run over a wide spectrum of temperatures, from 100° C to 800°C, to create photosensitive films that can maximize the efficiency of PV cells in converting sunlight to electricity. In addition, the system can handle a variety of substrates, including transparent glass and both round or square silicon wafers with thicknesses ranging from 150 microns to several centimeters.