Sensirion is launching a flow sensor for flow rates below 2 cc/sec (120 ml/min) with hydrocarbon-based liquids such as photoresists and solvents. Designed for use in high-purity fluid handling applications in the semiconductor, PV and flat panel display industries, the new SLQ-QT105 sensor features a short measurement response time of approximately 40 ms and high sensitivity for flow rates down to 0.05 cc/sec (3 ml/min). Detection of air bubbles in the microliter range is also possible. Flow is measured without moving parts and non-invasively through the wall of a straight flow path. All wetted materials are made from Teflon or quartz glass. The compact, lightweight device is equipped with fittings for 4 x 3mm PFA tubing. A smart digital interface and robust RS485 communication is offered for long distance and bus capability.
Liquid Flow Sensor
Graduated in political sciences and international relations in Paris, Anis joined the team in early 2019. Editor for IEN Europe and the new digital magazine AI IEN, he is a new tech enthusiast. Also passionate about sports, music, cultures and languages.
