Bidirectionally measuring the flow of air and other non-agressive gases at rates up to 200 slm with high accuracy and very high speed, Sensirion's SFM3000 mass flow meter output a 14-bit digital signal at a 2kHz update rate. The flow channel is designed to achieve a pressure drop <3mbar through the sensor element. The signal is internally linearized and temperature compensated. Furthermore, the mass flow meter operates from a 5Vdc supply voltage and features a digital 2-wire interface, making it easy to connect directly to a microcontroller. It is based on the company's CMOSens Technology, in which the sensor element, signal processing and digital calibration are combined on a tiny microchip. Gas flow is measured by a thermal sensor element to provide an extended dynamic range and enhanced long term stability compared to other flow measuring technologies. The flow meter is suited for high quality mass production and is the ideal choice for demanding and cost-sensitive OEM applications in medical ventilation and anesthesia, as well as process automation and burner control.
Mass Flow Meter
