Micropositioning Stage

The new linear stage version M-663.5U from Physik Instrumente is especially suited for positioning tasks in automation where a resolution of 0.6 µm and a step size of 2 µm are sufficient. The integrated PILine linear motor provides push forces to 5 N and a maximum velocity of up to 250 mm/s over a 18 mm travel range. All stage versions offer the benefits proprietary to the PILine drive technology: Since ceramic motors feature high holding forces also when at rest, the linear stage ensures excellent positional stability without heat generation, as it would occur with conventional linear motors. The stiff design, direct coupling and fast response times of the piezo ceramic allow for highly dynamic start / stop behavior. Simultaneously with the launch of the cost-effective stage variant, the supplier also enhanced the design of the high-precision, 0.1 µm resolution positioning stage: Drive and guiding have been decoupled and with this the guiding accuracy of the linear stages has been improved.