PlanarHD air bearing stage

The PlanarHD air bearing stage features several design enhancements for increased throughput in ultra-high precision step-and-settle and scanning applications such as semiconductor processing and emerging MEMS/Nano technologies. The 500x500mm travel stage includes larger air bearing surfaces for significantly improved dynamic characteristics as well as higher power linear servo motors on both axes to deliver an impressive specification that includes a 2m/sec scan velocity and peak acceleration to 5g - with a positioning resolution of up to 0.25 nanometres, repeatability to 50 nanometres and accuracy to +/- 300 nanometres. It employs a low mass structural bearing design with a balanced air-on-air preload system for higher lateral, vertical and angular stiffness resulting in improved speed, acceleration and accuracy characteristics. Nominal payload is 5kg to maintain dynamic specifications with an upper limit of 30kg. The H-bridge design utilises dual air-bearings, dual linear motors and dual linear encoders on the step axis.