Wafer ID Reader

Including features designed to improve both read rates and reliability, Cognex Corporation’s next-generation wafer identification (ID) reader, the In-Sight 1740, and accompanying In-Sight Explorer Wafer ID software version 4.5.0 make it easier to configure and maintain the reader on a wide range of wafer handling and process tools. Combined, these features help ensure maximum tool uptime, uninterrupted by the need for human intervention in the wafer ID step. Reducing the typical reading time by 40%, the wafer readers take advantage of new automatic, self-optimization features that increase read rates and reliability on even the most difficult-to-read ID marks while ensuring trouble-free, unattended operation. Based on built-in row of external LEDs, their internal illumination system produces high-readability bright field images and delivers exceptionally high contrast images of the ID marks on many types of wafers. As new types of wafer process coatings are developed, the readers can be extended to meet new imaging challenges with specialized lighting powered by the external light expansion port. Fully backward compatible with the exact same dimensions, mounting hole pattern and remote command set, they can be used everywhere the In-Sight 1720 series readers are used today. The new In-Sight Explorer Wafer ID software, version 4.5.0, includes several new tools. Automatic image enhancement filters overcome visual degradations. In the most severe cases, enhancement filters are able to turn reading failure into reading success, without the need for human intervention. The software also offers enhanced support for 300 mm wafers.